Design and Experimentation of A MEMS Accelerometer with High Overload Resistance
WANG Shiqiu, GAO Yang, QI Yonghong, ZHANG Xiaopeng, ZHAO Minghui, ZHU Yunfei, LIU Chuang, FENG Rui, WEI Xueyong
Navigation and Control . 2025, (3-4): 111 -125 .  DOI: 10.3969/j.issn.1674-5558.2025.h3.010