Design and Experimentation of A MEMS Accelerometer with High Overload Resistance

WANG Shiqiu, GAO Yang, QI Yonghong, ZHANG Xiaopeng, ZHAO Minghui, ZHU Yunfei, LIU Chuang, FENG Rui, WEI Xueyong

Navigation and Control ›› 2025, Vol. 24 ›› Issue (3-4) : 111-125.

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Navigation and Control ›› 2025, Vol. 24 ›› Issue (3-4) : 111-125. DOI: 10.3969/j.issn.1674-5558.2025.h3.010
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Design and Experimentation of A MEMS Accelerometer with High Overload Resistance

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 24(3-4): 111-125 https://doi.org/10.3969/j.issn.1674-5558.2025.h3.010

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