
Design and Experimentation of A MEMS Accelerometer with High Overload Resistance
WANG Shiqiu, GAO Yang, QI Yonghong, ZHANG Xiaopeng, ZHAO Minghui, ZHU Yunfei, LIU Chuang, FENG Rui, WEI Xueyong
Navigation and Control ›› 2025, Vol. 24 ›› Issue (3-4) : 111-125.
Design and Experimentation of A MEMS Accelerometer with High Overload Resistance
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