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中文
Methodology for Assessing Hermeticity Reliability in Wafer-level Packaging MEMS Inertial Devices
ZHANG Chenggang, ZHAO Qiancheng, CUI Jian
Navigation and Control . 2025, (
3-4
): 51 -64 . DOI: 10.3969/j.issn.1674-5558.2025.h3.004
