Methodology for Assessing Hermeticity Reliability in Wafer-level Packaging MEMS Inertial Devices

doi:10.3969/j.issn.1674-5558.2025.h3.004

ZHANG Chenggang, ZHAO Qiancheng, CUI Jian

Navigation and Control ›› 2025, Vol. 24 ›› Issue (3-4) : 51-64.

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Navigation and Control ›› 2025, Vol. 24 ›› Issue (3-4) : 51-64. DOI: 10.3969/j.issn.1674-5558.2025.h3.004

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Methodology for Assessing Hermeticity Reliability in Wafer-level Packaging MEMS Inertial Devices

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 24(3-4): 51-64 https://doi.org/10.3969/j.issn.1674-5558.2025.h3.004

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Received	Published
2025-04-21	2025-08-05
Issue Date
2025-09-04

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