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中文
Research on MEMS Silicon Pressure Sensor Precision Dispensing Packaging System
XUE Liwei, LIU Huan, ZHANG Wenxia, WANG Yangjun, CHEN Liguo
Navigation and Control . 2025, (
1
): 107 -117 . DOI: 10.3969/j.issn.1674-5558.2025.01.011
