Research on MEMS Silicon Pressure Sensor Precision Dispensing Packaging System

doi:10.3969/j.issn.1674-5558.2025.01.011

XUE Liwei, LIU Huan, ZHANG Wenxia, WANG Yangjun, CHEN Liguo

Navigation and Control ›› 2025, Vol. 24 ›› Issue (1) : 107-117.

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Navigation and Control ›› 2025, Vol. 24 ›› Issue (1) : 107-117. DOI: 10.3969/j.issn.1674-5558.2025.01.011

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Research on MEMS Silicon Pressure Sensor Precision Dispensing Packaging System

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 24(1): 107-117 https://doi.org/10.3969/j.issn.1674-5558.2025.01.011

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Received	Published
2024-04-19	2025-02-05
Issue Date
2025-03-12

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