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中文
Micro-assembly Method of MEMS Resonant Accelerometer
CONG Hao, WANG Yangjun, ZHAO Yue, LIU Huan, PAN Lei, ZHAO Linfeng, YUAN Detao, TAN Bojie
Navigation and Control . 2024, (
3
): 20 -26 . DOI: 10.3969/j.issn.1674-5558.2024.03.003
