Micro-assembly Method of MEMS Resonant Accelerometer

doi:10.3969/j.issn.1674-5558.2024.03.003

CONG Hao, WANG Yangjun, ZHAO Yue, LIU Huan, PAN Lei, ZHAO Linfeng, YUAN Detao, TAN Bojie

Navigation and Control ›› 2024, Vol. 23 ›› Issue (3) : 20-26.

PDF(6829 KB)

Navigation and Control ›› 2024, Vol. 23 ›› Issue (3) : 20-26. DOI: 10.3969/j.issn.1674-5558.2024.03.003

Quartz Vibrating Beam Accelerometer Album

Micro-assembly Method of MEMS Resonant Accelerometer

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 23(3): 20-26 https://doi.org/10.3969/j.issn.1674-5558.2024.03.003

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(6829 KB)

Accesses

Citation

Detail

Sections

Recommended

Received	Published
2024-03-25	2024-06-05
Issue Date
2024-11-26

Please choose a citation manager

Content to export