压阻式加速度传感器封装应力隔离结构分析

尚思瑶, 刘岩, 莫舒婷

Investigation on Mechanical Isolation of Packaging Stress in Piezoresistive Accelerometer

SHANG Si-yao, LIU Yan, MO Shu-ting

导航与控制 . 2019, (4): 59 -64 . DOI: 10.3969/j.issn.1674-5558.2019.04.009