静电悬浮微加速度计高灵敏度电容检测通道设计
马高印, 严小军, 郭晓芳
Design of High-sensitivity Capacitive Displacement Sensing Channel for Micromachined Electrostatically Suspended Accelerometer
MA Gao-yin, YAN Xiao-jun, GUO Xiao-fang
导航与控制
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2011, (2): 22
-25
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DOI: 10.3969/j.issn.1674-5558.2011.02.006
