静电悬浮微加速度计气膜阻尼分析

张龙, 何志坚, 邓忠武, 马高印

Analysis of Gas Film Damping in Electrostatically SuspendedMicromechanical Accelerometer

ZHANG Long, HE Zhi-jian, DENG Zhong-wu, MA Gao-yin

导航与控制 . 2012, (3): 52 -55 . DOI: 10.3969/j.issn.1674-5558.2012.03.012