一种基于高线性度弓形支撑梁的新型MEMS陀螺设计
梁新建, 郑旭东, 李丹东, 薛旭, 万蔡辛
A Novel Design of MEMS Gyroscope Based on High Linearity Bow-shaped Beam
LIANG Xin-jian, ZHENG Xu-dong, LI Dan-dong, XUE Xu, WAN Cai-xin
导航与控制
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2011, (3): 49
-53
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DOI: 10.3969/j.issn.1674-5558.2011.03.011
