硅微陀螺平板结构的压膜阻尼研究
赵亭杰, 穆京京, 徐宇新, 邢朝阳
Study on the Squeeze-film Damping of the Plate Structure of the Silicon Micro-machined Gyroscope
ZHAO Ting-jie, MU Jing-jing, XU Yu-xin, XING Chao-yang
导航与控制
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2014, (4): 41
-46
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DOI: 10.3969/j.issn.1674-5558.2014.04.009
