电容式MEMS陀螺仪低噪声读出电路的集成化设计
卢月, 李兆涵, 卢宏斌, 汪家奇, 常玉春
Integrated Design of a Low-noise Readout Circuit for Capacitive MEMS Gyroscope
LU Yue, LI Zhaohan, LU Hongbin, WANG Jiaqi, CHANG Yuchun
导航与控制
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2025, (3-4): 152
-159
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DOI: 10.3969/j.issn.1674-5558.2025.h3.014
