抗高过载微机电系统加速度传感器设计与试验
王实秋, 高阳, 齐永宏, 张晓鹏, 赵明辉, 朱云飞, 刘闯, 凤瑞, 韦学勇
Design and Experimentation of A MEMS Accelerometer with High Overload Resistance
WANG Shiqiu, GAO Yang, QI Yonghong, ZHANG Xiaopeng, ZHAO Minghui, ZHU Yunfei, LIU Chuang, FENG Rui, WEI Xueyong
导航与控制
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2025, (3-4): 111
-125
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DOI: 10.3969/j.issn.1674-5558.2025.h3.010
