基于腔光力系统与抗塌陷脊波导的微陀螺仪集成设计
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Integrated Design of Micro-gyroscope Based on Cavity Optomechanical System and Anti-collapse Ridge Waveguide
LI Zhe, LIU Jun, LIU Xiaolan, KUANG Pengju, CHEN Kai, HUANG Yongjun
导航与控制
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2025, (3-4): 83
-91
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DOI: 10.3969/j.issn.1674-5558.2025.h3.007
