MEMS硅压力传感器精密点胶封装系统研究
薛立伟, 刘欢, 张雯霞, 王阳俊, 陈立国
Research on MEMS Silicon Pressure Sensor Precision Dispensing Packaging System
XUE Liwei, LIU Huan, ZHANG Wenxia, WANG Yangjun, CHEN Liguo
导航与控制
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2025, (1): 107
-117
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DOI: 10.3969/j.issn.1674-5558.2025.01.011
