微半球陀螺谐振子制造工艺研究现状
姚宇熠, 王亚波, 程瑞昭, 杨功流, 闻泽阳
Research Progress of Manufacturing Technology for Micro Hemispherical Gyroscope Resonator
YAO Yuyi, WANG Yabo, CHENG Ruizhao, YANG Gongliu, WEN Zeyang
导航与控制
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2025, (1): 12
-24
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DOI: 10.3969/j.issn.1674-5558.2025.01.002
