硅微静电悬浮陀螺微位移检测电路噪声分析

硅微静电悬浮陀螺微位移检测电路噪声分析

徐超, 严小军, 马高印, 桑文华

Noise Analysis of Micro-displacement Detection Circuit of MESG

XU Chao, YAN Xiao-jun, MA Gao-yin, SANG Wen-hua

导航与控制 . 2014, (1): 24 -28 . DOI: 10.3969/j.issn.1674-5558.2014.01.006