陶瓷-金属一体化MEMS加速度计低应力封装研究
刘嘉, 潘协根, 尹化婷, 庄永河, 李林森
Research on Low Stress Packaging of Ceramic-metal Integrated MEMS Accelerometer
LIU Jia, PAN Xie-gen, YIN Hua-ting, ZHUANG Yong-he, LI Lin-sen
导航与控制
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2022, (3-4): 210
-217
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DOI: 10.3969/j.issn.1674-5558.2022.h3.025
