基于有限元模拟的三维集成微系统热循环可靠性研究
萧金庆, 李军辉
Research on Thermal Cycle Reliability of Three-dimensional Integrated Structure Microsystem Based on Finite Element Simulation
XIAO Jin-qing, LI Jun-hui
导航与控制
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2022, (3-4): 174
-180
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DOI: 10.3969/j.issn.1674-5558.2022.h3.021
