微系统TSV多物理场耦合分析及结构优化
张涛, 王勇, 冯长磊, 周政, 夏靖超, 胡培峰
Multiphysics Coupling Analysis and Structural Optimization of TSVs in Microsystems
ZHANG Tao, WANG Yong, FENG Chang-lei, ZHOU Zheng, XIA Jing-chao, HU Pei-feng
导航与控制
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2022, (3-4): 67
-77
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DOI: 10.3969/j.issn.1674-5558.2022.h3.008
