微机电系统陀螺仪单层隔热槽结构优化设计
张浩, 何汉辉, 肖定邦, 曾承志, 吴学忠
Optimization of Single Layer Thermal Isolation Slot for MEMS Gyroscope
ZHANG Hao, HE Han-hui, XIAO Ding-bang, ZENG Cheng-zhi, WU Xue-zhong
导航与控制
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2021, (5): 148
-156
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DOI: 10.3969/j.issn.1674-5558.2021.05.015
