Research Progress of Manufacturing Technology for Micro Hemispherical Gyroscope Resonator
YAO Yuyi, WANG Yabo, CHENG Ruizhao, YANG Gongliu, WEN Zeyang
Navigation and Control . 2025, (1): 12 -24 .  DOI: 10.3969/j.issn.1674-5558.2025.01.002