Research on Structure and Residual Stress of TiN Films Deposited on Particular Substrate

Cui Yan

Navigation and Control ›› 2010, Vol. 9 ›› Issue (2) : 67-71.

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Navigation and Control ›› 2010, Vol. 9 ›› Issue (2) : 67-71.

Material and Manufacture

Research on Structure and Residual Stress of TiN Films Deposited on Particular Substrate

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 9(2): 67-71

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2020-04-30

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