Sensitivity Analysis of Micro-grating Accelerometer Based on Electrostatic Rigidity

doi:10.3969/j.issn.l674-5558.2015.06.013

FENG Li-shuang, LIU Wei-fang, YAO Bao-yin

Navigation and Control ›› 2015, Vol. 14 ›› Issue (6) : 70-74.

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Navigation and Control ›› 2015, Vol. 14 ›› Issue (6) : 70-74. DOI: 10.3969/j.issn.l674-5558.2015.06.013

Sensitivity Analysis of Micro-grating Accelerometer Based on Electrostatic Rigidity

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 14(6): 70-74 https://doi.org/10.3969/j.issn.l674-5558.2015.06.013

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Received	Published
2014-10-17	2015-12-05
Issue Date
2020-05-28

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