Review of Research on Modal Matching Technology for Silicon MEMS Gyroscopes

doi:10.3969/j.issn.1674-5558.2024.02.002

XIA Chenhao, ZHENG Xudong, WANG Xuetong, SHEN Yaojie, TONG Wenyuan, LIU Guowen

Navigation and Control ›› 2024, Vol. 23 ›› Issue (2) : 19-29.

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Navigation and Control ›› 2024, Vol. 23 ›› Issue (2) : 19-29. DOI: 10.3969/j.issn.1674-5558.2024.02.002

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Review of Research on Modal Matching Technology for Silicon MEMS Gyroscopes

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 23(2): 19-29 https://doi.org/10.3969/j.issn.1674-5558.2024.02.002

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Received	Published
2023-10-12	2024-04-05
Issue Date
2024-09-25

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