Research on MEMS Sensor Oven-controlled Model with Adjustable Temperature Sensing Bridge

doi:10.3969/j.issn.1674-5558.2023.03.011

FAN You-you, ZHOU Jin-qiu, ZHOU Bo-yuan, ZHANG Long, QUAN Hai-yang

Navigation and Control ›› 2023, Vol. 22 ›› Issue (3) : 76-85.

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Navigation and Control ›› 2023, Vol. 22 ›› Issue (3) : 76-85. DOI: 10.3969/j.issn.1674-5558.2023.03.011

Sensors and Actuators

Research on MEMS Sensor Oven-controlled Model with Adjustable Temperature Sensing Bridge

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 22(3): 76-85 https://doi.org/10.3969/j.issn.1674-5558.2023.03.011

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