Research on Low Stress Packaging of Ceramic-metal Integrated MEMS Accelerometer

doi:10.3969/j.issn.1674-5558.2022.h3.025

LIU Jia, PAN Xie-gen, YIN Hua-ting, ZHUANG Yong-he, LI Lin-sen

Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 210-217.

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Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 210-217. DOI: 10.3969/j.issn.1674-5558.2022.h3.025

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Research on Low Stress Packaging of Ceramic-metal Integrated MEMS Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 21(3-4): 210-217 https://doi.org/10.3969/j.issn.1674-5558.2022.h3.025

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Received	Published
2022-04-13	2022-08-05
Issue Date
2022-11-07

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