Study on Resonance Interference Mechanism and Protection Scheme of MEMS Gyroscope

doi:10.3969/j.issn.1674-5558.2022.h3.023

GUO Peng, WU Jun-jie, ZHU Jia-jing, JIANG Ying, FENG Li-hui

Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 192-201.

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Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 192-201. DOI: 10.3969/j.issn.1674-5558.2022.h3.023

Microsystem Album——Reliability Technology

Study on Resonance Interference Mechanism and Protection Scheme of MEMS Gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 21(3-4): 192-201 https://doi.org/10.3969/j.issn.1674-5558.2022.h3.023

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Received	Published
2022-04-12	2022-08-05
Issue Date
2022-11-07

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