Research on Wafer Level Electromechanical Control SiP Technology

Research on Wafer Level Electromechanical Control SiP Technology

LI Ju-qiang, LIAN Yun-he, WANG Meng-ya, GU Lin

Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 78-84.

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Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 78-84. DOI: 10.3969/j.issn.1674-5558.2022.h3.009

Microsystem Album——Microsystem Integration Package

Research on Wafer Level Electromechanical Control SiP Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 21(3-4): 78-84 https://doi.org/10.3969/j.issn.1674-5558.2022.h3.009

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