Recent Development and Perspectives of Microsystem Integration Technology

doi:10.3969/j.issn.1674-5558.2022.h3.003

SHAN Guang-bao, ZHU Jia-jing, ZHENG Yan-wen, XING Chao-yang

Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 20-28.

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Navigation and Control ›› 2022, Vol. 21 ›› Issue (3-4) : 20-28. DOI: 10.3969/j.issn.1674-5558.2022.h3.003

Microsystem Album——Summary of Microsystem Technology

Recent Development and Perspectives of Microsystem Integration Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 21(3-4): 20-28 https://doi.org/10.3969/j.issn.1674-5558.2022.h3.003

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Received	Published
2022-04-10	2022-08-05
Issue Date
2022-11-07

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