Optimization of Single Layer Thermal Isolation Slot for MEMS Gyroscope

doi:10.3969/j.issn.1674-5558.2021.05.015

ZHANG Hao, HE Han-hui, XIAO Ding-bang, ZENG Cheng-zhi, WU Xue-zhong

Navigation and Control ›› 2021, Vol. 20 ›› Issue (5) : 148-156.

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Navigation and Control ›› 2021, Vol. 20 ›› Issue (5) : 148-156. DOI: 10.3969/j.issn.1674-5558.2021.05.015

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Optimization of Single Layer Thermal Isolation Slot for MEMS Gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 20(5): 148-156 https://doi.org/10.3969/j.issn.1674-5558.2021.05.015

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