Frequency Characteristic Analysis of Silicon Resonant Accelerometer Based on Structure Parameters

doi:10.3969/j.issn.1674-5558.2021.02.010

GUO Xue-tao, LI Yi-lun, LI Peng-fei

Navigation and Control ›› 2021, Vol. 20 ›› Issue (2) : 68-73.

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Navigation and Control ›› 2021, Vol. 20 ›› Issue (2) : 68-73. DOI: 10.3969/j.issn.1674-5558.2021.02.010

Sensors and Actuators

Frequency Characteristic Analysis of Silicon Resonant Accelerometer Based on Structure Parameters

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 20(2): 68-73 https://doi.org/10.3969/j.issn.1674-5558.2021.02.010

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