A New Low-noise Capacitive Readout Circuit for Silicon Micro-machined Gyroscope

doi:10.3969/j.issn.1674-5558.2019.06.014

WU Chuan-qi, ZHANG Huan-yang, TONG Zi-ping, LONG Shan-li, HE Ke-jun

Navigation and Control ›› 2019, Vol. 18 ›› Issue (6) : 100-106.

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Navigation and Control ›› 2019, Vol. 18 ›› Issue (6) : 100-106. DOI: 10.3969/j.issn.1674-5558.2019.06.014

Sensors and Actuators

A New Low-noise Capacitive Readout Circuit for Silicon Micro-machined Gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 18(6): 100-106 https://doi.org/10.3969/j.issn.1674-5558.2019.06.014

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Received	Published
2018-11-28	2019-12-05
Issue Date
2020-02-25

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