Temperature Performance Optimization of Comb-finger Capacitive Micro Accelerometer

doi:10.3969/j.issn.1674-5558.2019.04.014

WANG Shuai-min, SUN Guo-liang, NIU Hao-bin, LI Bo-yang, YU Cai-jia

Navigation and Control ›› 2019, Vol. 18 ›› Issue (4) : 89-94.

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Navigation and Control ›› 2019, Vol. 18 ›› Issue (4) : 89-94. DOI: 10.3969/j.issn.1674-5558.2019.04.014

Inertial accelerometer technology

Temperature Performance Optimization of Comb-finger Capacitive Micro Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 18(4): 89-94 https://doi.org/10.3969/j.issn.1674-5558.2019.04.014

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Received	Published
2019-05-24	2019-08-20
Issue Date
2019-11-19

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