Investigation on Mechanical Isolation of Packaging Stress in Piezoresistive Accelerometer

SHANG Si-yao, LIU Yan, MO Shu-ting

Navigation and Control ›› 2019, Vol. 18 ›› Issue (4) : 59-64.

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Navigation and Control ›› 2019, Vol. 18 ›› Issue (4) : 59-64. DOI: 10.3969/j.issn.1674-5558.2019.04.009
Inertial accelerometer technology

Investigation on Mechanical Isolation of Packaging Stress in Piezoresistive Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 18(4): 59-64 https://doi.org/10.3969/j.issn.1674-5558.2019.04.009

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