Research of Mass Production Testing System for MEMS Inertial Component

doi:10.3969/j.issn.1674-5558.2017.06.012

XU Guo-ping, WANG Fu, QIAO Wei, ZHOU Jian-guo

Navigation and Control ›› 2017, Vol. 16 ›› Issue (6) : 64-67.

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Navigation and Control ›› 2017, Vol. 16 ›› Issue (6) : 64-67. DOI: 10.3969/j.issn.1674-5558.2017.06.012

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Research of Mass Production Testing System for MEMS Inertial Component

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 16(6): 64-67 https://doi.org/10.3969/j.issn.1674-5558.2017.06.012

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Received	Published
2017-08-02	2017-12-05
Issue Date
2020-02-04

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