Research Status and Development Trend of Silicon Resonant Accelerometer

Research Status and Development Trend of Silicon Resonant Accelerometer

YANG Bo, KAN Bao-xi, XU Yu-xin, HU Qi-fang

Navigation and Control ›› 2017, Vol. 16 ›› Issue (4) : 96-106.

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Navigation and Control ›› 2017, Vol. 16 ›› Issue (4) : 96-106. DOI: 10.3969/j.issn.1674-5558.2017.04.017

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Research Status and Development Trend of Silicon Resonant Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 16(4): 96-106 https://doi.org/10.3969/j.issn.1674-5558.2017.04.017

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