Monolithic Integrated Tri-axis MEMS Gyroscope

Monolithic Integrated Tri-axis MEMS Gyroscope

XING Chao-yang, ZHAO Ke, XU Yu-xin

Navigation and Control ›› 2017, Vol. 16 ›› Issue (2) : 58-63.

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Navigation and Control ›› 2017, Vol. 16 ›› Issue (2) : 58-63. DOI: 10.3969/j.issn.1674-5558.2017.02.011

Instrument and Circuit

Monolithic Integrated Tri-axis MEMS Gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 16(2): 58-63 https://doi.org/10.3969/j.issn.1674-5558.2017.02.011

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