Study on the Squeeze-film Damping of the Plate Structure of the Silicon Micro-machined Gyroscope

ZHAO Ting-jie, MU Jing-jing, XU Yu-xin, XING Chao-yang

Navigation and Control ›› 2014, Vol. 13 ›› Issue (4) : 41-46.

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Navigation and Control ›› 2014, Vol. 13 ›› Issue (4) : 41-46. DOI: 10.3969/j.issn.1674-5558.2014.04.009
Instrument and Circuit

Study on the Squeeze-film Damping of the Plate Structure of the Silicon Micro-machined Gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 13(4): 41-46 https://doi.org/10.3969/j.issn.1674-5558.2014.04.009

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