Analysis of Gas Film Damping in Electrostatically SuspendedMicromechanical Accelerometer

doi:10.3969/j.issn.1674-5558.2012.03.012

ZHANG Long, HE Zhi-jian, DENG Zhong-wu, MA Gao-yin

Navigation and Control ›› 2012, Vol. 11 ›› Issue (3) : 52-55.

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Navigation and Control ›› 2012, Vol. 11 ›› Issue (3) : 52-55. DOI: 10.3969/j.issn.1674-5558.2012.03.012

Instrument and Circuit

Analysis of Gas Film Damping in Electrostatically SuspendedMicromechanical Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 11(3): 52-55 https://doi.org/10.3969/j.issn.1674-5558.2012.03.012

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