A Design of Electrostatically Suspended Micromechanical Accelerometer Signal Sensing Circuit

YOU Peng-cheng, YAN Xiao-jun, MA Gao-yin

Navigation and Control ›› 2011, Vol. 10 ›› Issue (4) : 22-26.

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Navigation and Control ›› 2011, Vol. 10 ›› Issue (4) : 22-26. DOI: 10.3969/j.issn.1674-5558.2011.04.005
Instrument and Circuit

A Design of Electrostatically Suspended Micromechanical Accelerometer Signal Sensing Circuit

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 10(4): 22-26 https://doi.org/10.3969/j.issn.1674-5558.2011.04.005

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