Design of 6-Degree of Freedom Suspension Control System for a Si-substrate Micromachined Accelerometer

doi:10.3969/j.issn.1674-5558.2011.04.004

MA Gao-yin, YAN Xiao-jun, HAN Feng-tian

Navigation and Control ›› 2011, Vol. 10 ›› Issue (4) : 16-21.

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Navigation and Control ›› 2011, Vol. 10 ›› Issue (4) : 16-21. DOI: 10.3969/j.issn.1674-5558.2011.04.004

Instrument and Circuit

Design of 6-Degree of Freedom Suspension Control System for a Si-substrate Micromachined Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 10(4): 16-21 https://doi.org/10.3969/j.issn.1674-5558.2011.04.004

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