A Novel Design of MEMS Gyroscope Based on High Linearity Bow-shaped Beam

doi:10.3969/j.issn.1674-5558.2011.03.011

LIANG Xin-jian, ZHENG Xu-dong, LI Dan-dong, XUE Xu, WAN Cai-xin

Navigation and Control ›› 2011, Vol. 10 ›› Issue (3) : 49-53.

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Navigation and Control ›› 2011, Vol. 10 ›› Issue (3) : 49-53. DOI: 10.3969/j.issn.1674-5558.2011.03.011

Instrument and Circuit

A Novel Design of MEMS Gyroscope Based on High Linearity Bow-shaped Beam

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 10(3): 49-53 https://doi.org/10.3969/j.issn.1674-5558.2011.03.011

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