Design of High-sensitivity Capacitive Displacement Sensing Channel for Micromachined Electrostatically Suspended Accelerometer

doi:10.3969/j.issn.1674-5558.2011.02.006

MA Gao-yin, YAN Xiao-jun, GUO Xiao-fang

Navigation and Control ›› 2011, Vol. 10 ›› Issue (2) : 22-25.

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Navigation and Control ›› 2011, Vol. 10 ›› Issue (2) : 22-25. DOI: 10.3969/j.issn.1674-5558.2011.02.006

Instrument and Circuit

Design of High-sensitivity Capacitive Displacement Sensing Channel for Micromachined Electrostatically Suspended Accelerometer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 10(2): 22-25 https://doi.org/10.3969/j.issn.1674-5558.2011.02.006

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