Study on air damping of three sorts of capacitive micro-accelerometers

doi:10.3969/j.issn.1674-5558.2011.01.010

Wan Caixin, Li Dandong, Zhang Chengliang, Xue Xu

Navigation and Control ›› 2011, Vol. 10 ›› Issue (1) : 45-47.

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Navigation and Control ›› 2011, Vol. 10 ›› Issue (1) : 45-47. DOI: 10.3969/j.issn.1674-5558.2011.01.010

Instrument and Cireuit

Study on air damping of three sorts of capacitive micro-accelerometers

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 10(1): 45-47 https://doi.org/10.3969/j.issn.1674-5558.2011.01.010

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