Technologies and Development of Silicon Oscillating Accelerometer(SOA)

doi:10.3969/j.issn.1674-5558.2011.01.008

Yao Baoyin, Feng Lishuang, Zhou Zhen, Chi Yuanyuan

Navigation and Control ›› 2011, Vol. 10 ›› Issue (1) : 33-40.

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Navigation and Control ›› 2011, Vol. 10 ›› Issue (1) : 33-40. DOI: 10.3969/j.issn.1674-5558.2011.01.008

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Technologies and Development of Silicon Oscillating Accelerometer(SOA)

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 10(1): 33-40 https://doi.org/10.3969/j.issn.1674-5558.2011.01.008

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