特种材料表面镀TiN薄膜的结构与应力研究

特种材料表面镀TiN薄膜的结构与应力研究

崔砚

Research on Structure and Residual Stress of TiN Films Deposited on Particular Substrate

Cui Yan

导航与控制 . 2010, (2): 67 -71 .