MEMS谐振式加速度计微组装方法
丛昊, 王阳俊, 赵悦, 刘欢, 潘磊, 赵林峰, 袁德涛, 谭博杰
Micro-assembly Method of MEMS Resonant Accelerometer
CONG Hao, WANG Yangjun, ZHAO Yue, LIU Huan, PAN Lei, ZHAO Linfeng, YUAN Detao, TAN Bojie
导航与控制
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2024, (3): 20
-26
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DOI: 10.3969/j.issn.1674-5558.2024.03.003
